Characterization of SiOxNy anti-reflective coatings using SIMS and RBS/HFS

Authors:

Adli A. Saleh

J. Bruce Rothmann

J.F. Kirchhoff

Jiro Yota

Chau Nguyen

Journal Name:

Thin Solid Films

Volume:

363

Issue:

1

Pages From:

355

To:

356

Date:

Friday, January 1, 1999