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High deposition rate a-Si:H for the flat panel display industry

Authors: 
J. Hautala, Z. M. Saleh, J.F.M. Westendorp, H. Meiling, S. Sherman and S. Wagner
Conference: 
High deposition rate a-Si:H for the flat panel display industry
Proceeding Volume: 
1997
Location: 
San Francisco, USA
Date: 
Tuesday, April 1, 1997
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